JPS6149713U - - Google Patents
Info
- Publication number
- JPS6149713U JPS6149713U JP13477684U JP13477684U JPS6149713U JP S6149713 U JPS6149713 U JP S6149713U JP 13477684 U JP13477684 U JP 13477684U JP 13477684 U JP13477684 U JP 13477684U JP S6149713 U JPS6149713 U JP S6149713U
- Authority
- JP
- Japan
- Prior art keywords
- transfer device
- clean air
- load
- cover
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims 1
- 230000000750 progressive effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13477684U JPH0237763Y2 (en]) | 1984-09-04 | 1984-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13477684U JPH0237763Y2 (en]) | 1984-09-04 | 1984-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6149713U true JPS6149713U (en]) | 1986-04-03 |
| JPH0237763Y2 JPH0237763Y2 (en]) | 1990-10-12 |
Family
ID=30693281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13477684U Expired JPH0237763Y2 (en]) | 1984-09-04 | 1984-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237763Y2 (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62200610U (en]) * | 1986-06-10 | 1987-12-21 | ||
| JPS6348706U (en]) * | 1986-09-17 | 1988-04-02 | ||
| JP2011173478A (ja) * | 2010-02-24 | 2011-09-08 | Muratec Automation Co Ltd | 搬送車システム |
-
1984
- 1984-09-04 JP JP13477684U patent/JPH0237763Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62200610U (en]) * | 1986-06-10 | 1987-12-21 | ||
| JPS6348706U (en]) * | 1986-09-17 | 1988-04-02 | ||
| JP2011173478A (ja) * | 2010-02-24 | 2011-09-08 | Muratec Automation Co Ltd | 搬送車システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0237763Y2 (en]) | 1990-10-12 |